The determination of the efficiency of energy dispersive X-ray spectrometers by a new reference material.

نویسندگان

  • Marco Alvisi
  • Markus Blome
  • Michael Griepentrog
  • Vasile-Dan Hodoroaba
  • Peter Karduck
  • Marco Mostert
  • Michele Nacucchi
  • Mathias Procop
  • Martin Rohde
  • Frank Scholze
  • Peter Statham
  • Ralf Terborg
  • Jean-Francois Thiot
چکیده

A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance.

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عنوان ژورنال:
  • Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

دوره 12 5  شماره 

صفحات  -

تاریخ انتشار 2006